半导体设备

300mm/200mm
Auto Switch Load Port

可兼容300及200mm晶員的 新一代机型

只需对300mmFOUP及200mm Open Cassette适配器进行切换即可使用!

特长

300mm/200mm Auto Switch 载入口

搭载载具自动识别功能

对应Mapping

搭载晶圆弹出传感器

可选配两种Open Cassette适配器

畅销版

翻转式OC适配器

平价版

平置式OC适配器

2 types of Open Cassette Adapter

翻转式OC适配器

200mm Open Cassette适配器 操作流程

FOUP Set / FOUP Remove / Adapter Stage Set Fix with bolts / Fix with bolts / Adapter Stage Open / Cassette Set  Adapter Stage Operation / Adapter Stage Close

Specification

LOAD PORT SELOP08C12F-S81 Series
Dimensions W474mm x D547mm x H1381mm(Load Port)
W455mm x D300mm x H432mm(Tilt-type 200mmOCA)
W430mm x D315mm x H373mm(Horizontal-type 200mmOCA)
Weight 65kg(LP)
13.2kg(Tilt-type 200mmOCA)
8.5kg(Horizontal-type 200mmOCA)
  200mm wafer operation 300mm wafer operation
Application 200mm 25 slot cassette
(SEMI-Standard)
300mm 25 slot FOUP
(SEMI-Standard)
Cycle time Open:11sec.(including mapping)、
Close:7sec.(excluding mapping)
Open:12sec.(including mapping)、
Close:9sec.(excluding mapping)
Door holding method N/A Vacuum absorption method
Detecting function ①Open Cassette normal placement
②Stage normal placement
③Wafer mapping
④Wafer protrusion
⑤Hand safety
①FOUP normal placement
②Foup door checking
③Wafer mapping
④Wafer protrusion
⑤Hand safety
Standard feature ①Wafer mapping
②Controller
③Carrier base placement adjustment mechanism
④Bolts surface position adjustment mechanism
⑤Cassette side-slip Prevention
⑥300mmFOUP Infopad pin holder
⑦Stage fixation at wafer horizontal position
⑧Minimizing vibration in rotating and Power
 
Utility ①Power:DC24V 5A
②CDA:0.45~0.6 MPa 20 L/min
③Vacuum:-40kPa 5L/min
Communication interface RS232C or Ethernet ※2
Options ①Customizable indicator panel
②Customizable switch panel
③Applicable to AC200V
④Applicable to FOSB※1
⑤E84
⑥E84,CID Communication(300mmFOUP only)
  • ※1Depending on FOSB type, performance may vary. Please contact us for details.
  • ※2Ethernet is either a registered trademark or a trademark of Xerox Corporation in the United States and/or other countries.

Outline Drawing

Outline Drawing