300mm/200mm
Auto Switch Load Port
可兼容300及200mm晶員的 新一代机型
只需对300mmFOUP及200mm Open Cassette适配器进行切换即可使用!
搭载载具自动识别功能
对应Mapping
搭载晶圆弹出传感器
可选配两种Open Cassette适配器
畅销版
翻转式OC适配器
平价版
平置式OC适配器
翻转式OC适配器
200mm Open Cassette适配器 操作流程
Specification
| LOAD PORT | SELOP08C12F-S81 Series |
|---|---|
| Dimensions | W474mm x D547mm x H1381mm（Load Port） |
| W455mm x D300mm x H432mm（Tilt-type 200mmOCA） | |
| W430mm x D315mm x H373mm（Horizontal-type 200mmOCA） | |
| Weight | 65kg（LP） |
| 13.2kg（Tilt-type 200mmOCA） | |
| 8.5kg（Horizontal-type 200mmOCA） |
| 200mm wafer operation | 300mm wafer operation | |
|---|---|---|
| Application | 200mm 25 slot cassette (SEMI-Standard) |
300mm 25 slot FOUP (SEMI-Standard) |
| Cycle time | Open：11sec.(including mapping)、 Close：7sec.(excluding mapping) |
Open：12sec.(including mapping)、 Close：9sec.(excluding mapping) |
| Door holding method | N/A | Vacuum absorption method |
| Detecting function |
①Open Cassette normal placement ②Stage normal placement ③Wafer mapping ④Wafer protrusion ⑤Hand safety |
①FOUP normal placement ②Foup door checking ③Wafer mapping ④Wafer protrusion ⑤Hand safety |
| Standard feature |
①Wafer mapping ②Controller ③Carrier base placement adjustment mechanism ④Bolts surface position adjustment mechanism |
|
| ⑤Cassette side-slip Prevention ⑥300mmFOUP Infopad pin holder ⑦Stage fixation at wafer horizontal position ⑧Minimizing vibration in rotating and Power |
||
| Utility |
①Power：DC24V 5A ②CDA：0.45～0.6 MPa 20 L/min ③Vacuum：-40kPa 5L/min |
|
| Communication interface | RS232C or Ethernet ※2 | |
| Options |
①Customizable indicator panel ②Customizable switch panel ③Applicable to AC200V ④Applicable to FOSB※1 ⑤E84 ⑥E84,CID Communication（300mmFOUP only） |
|
- ※1Depending on FOSB type, performance may vary. Please contact us for details.
- ※2Ethernet is either a registered trademark or a trademark of Xerox Corporation in the United States and/or other countries.
Outline Drawing
