Contributing to quality improvement
in semiconductor device manufacturing

for Front-End Process

Contribution to Further Miniaturization (1xnm)/300mm FOUP Load Port SELOP-8/N2 purge/300mm
300㎜/200㎜ Auto Switch LOAD PORT SELOP-8
300mm LOADER N2 EFEM System/N2 purge
300mm FOUP LOADER MODULE/EFEM/300mm N2 purge application/SELOP-7-N/N2 purge/300mm

for Back-End Process

Sorter Tape Frame FOUP Load Port
LED/Power Semiconductor Wafer/Automated Wafer Transportation System/N2 purge EFEM Solution for 3-D Stacking Device Process (Semiconductor Manufacturing Process using Tape Frame)