Ability to perform cutting edge processes
by regulating Ox/H2O levels within the EFEM.
・Less than 100ppm with low N2 Gas Consumption (100LPM) by N2 Gas Circulation System
・10 +/- 3.5 Pa gage
・With the stationary type robot, maximum 4 LP access is possible :
No need to change depth of N2 EFEM
・Maintenance access from side as Conventional EFEM (Or can use EFEM Side Position for Additional Options)
・Flexible Layout for Position of Customer L/L
・Digital Analyzers
(Oxygen Concentration, Dew Point, Temperature, Diff. Pressure)
・Real Time Data Monitoring
・Safely replace N2 gas to Air
*S2, S8, CE Compliance (In Progress)