Semiconductor

NEW

300mm FOUP LOADER MODULE

MINI ENVIRONMENT SYSTEM 2LP EFEM
(SELME series)

More Professionally, More Efficiently Support Semiconductor Technology

features

1.2-Link type wafer handing robot

Compact design (Min.turning ø495mm) with light weight type

2.Air supply line for wafer vacuum handling

High speed, high accurate positioning ±0.005are available with vacuum handling system

3.Absolute encoder

AC-servomotor with absolute encoder are applied for all axis

4.High mechanical throughput

Re-laid 220 wafers/h capacity