Semiconductor

200mm 300mm

Low Vacuum Wafer Handling Robot
(SELARM series)

Competitive price / High reliability
Low vacuum robot for semicondactor wafer handling

features

1.Competitive price for low vacuum application with high performance

2.Controller united, re-calibration not required

3.Variable application for wafer transfer in combination with EFEM

* Medium vacuum type, double-arm type, are available. High vacuum, dual-arms, type are under developing