Contribution to Next Generation Technology
(SEMICONDUCTOR Miniaturization to 12nm,7/8nm)
N2 purge
300mm FOUP Load Port
(Smart SELOP-7-N series)
Prevent cross contamination and surface oxidation
Quickly control wafer in FOUP through Loadport N2 purge function
- Control nozzle up/down timing
- Avoid interference to Kinematic Pin during FOUP placement
- Interoperatability of non-N2 purge FOUP
- Adjustment function of nozzle pressure
- Exchangeable nozzle heads for Suitable attach to ports
- Nozzle up / down position detect function (Sensor)
N2 purging on Carrier Base
- Adapted FOUP Type: ENTEGRIS A-300, Spectra
(4 Purge Port Type) #1
Preventing contamination through purge port
- (1)GAS-Filter at INLET Port side #2
- (2)Adhesion to Grommet of FOUP-side
Monitor N2 Gas flow rate by flow meter
Control N2 Gas flow rate by MFC
