Semiconductor

Fully compatible with 300mm BOLTS-M installation

BOLTS-M
SMIF Load Port

Contribute to high throughput at
200mm process line by automation

NEW

features

BOLTS-M SMIF Load Port

OHT Transfer Applicable

Secure SEMI E15 C2 Distance

E63 BOLTS-M Installation

Easy mounting design

RS-232C/Ethernet Applicable

High-performance/high-reliability control system
PIO option compatible
Ethernet is a registered trademark of Fuji Xerox Co., Ltd.

8-cell Indicator

Utilize indicator from 300mm LP

Mapping Functionality

Single / Double/ Cross Detection

Operation Flow

SMIF Pod Placement (Loading by OHT), CLAMP、VAC & UNLATCH / UP & MAP/ Loading completion