Semiconductor Equipment
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300/200mm Wafer Auto Switchingnew
Load Port
Smart SELOP-7NEW Series LOAD PORT
200mm Wafer is also available to
300mm Wafer LP by just setting Open Cassette Adapter.One Configuration Available in Both 300mm and 200mm. 
Features
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1300/200mm Wafer mapping function (No Change Required)
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2Preventing mechanism for wafer protrusion.
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3Safety lock function to keep adapter door close when wafer is being transported.
Able to Identity Automatically
- 300mm Wafer FOUP or 200mm Wafer Open cassette
- Automatically changes Load Port parameter and notify to Host
FOUP Set
FOUP Remove
Adapter Stage Set
Connector In
Adapter Stage Open
Adapter Stage Operation
Adapter Stage Close
Adapter Stage Dock