300/200mm Wafer Auto Switchingnew
NEW Series LOAD PORT
200mm Wafer is also available to
300mm Wafer LP by just setting Open Cassette Adapter.One Configuration Available in Both 300mm and 200mm.
1300/200mm Wafer mapping function (No Change Required)
2Preventing mechanism for wafer protrusion.
3Safety lock function to keep adapter door close when wafer is being transported.
Able to Identity Automatically
- 300mm Wafer FOUP or 200mm Wafer Open cassette
- Automatically changes Load Port parameter and notify to Host
- FOUP Set
- FOUP Remove
- Adapter Stage Set
- Connector In
- Adapter Stage Open
- Adapter Stage Operation
- Adapter Stage Close
- Adapter Stage Dock