Semiconductor Equipment

  • 300mm LOADER MODULE

    300mm EFEM
    (SELME series)

    More Professionally, More Efficiently Support Semiconductor Technology

    300mm Wafer transport robot

  • 300mm FOUP LOADER MODULE

Features

  • 1Vacuum-Less / Vacuum Wafer Handling (Clean Class 1)

    reduce adhearing particles on back side of wafer

  • 2Application to 200mm Wafer and Quartz Wafer

    (300mm Option)

  • 3High Speed and Accurate Wafer Handling (±0.05mm)

  • 4Installation of N2 Purge Loadports

    (Option)

  • 5Standard 3 Loadport Type + Extendable Module

    (Option)

  • 6Corrosion Resistance Compliance

    (Option)