Semiconductor Equipment

  • Contribution to Further Miniaturization (1xnm)

    300mm FOUP Load Portnew
    (Smart SELOP-8 Series)

    Extreamly Smooth
    FOUP door Open/Close Motion
    Great improvement of particle performance. Reduction of vibration during door open/close by hybrid of pneumatic and electric driven mechanism. Compliance of high sealed FOUP.


  • 1N2 purging on Carrier Base

    Adapted FOUP Type: ENTEGRIS A-300, Spectra (4 Purge Port Type)

  • 2Purge Clean N2 Gas

    • Filters, installed just in front of the nozzle, can block particle from entering to FOUP
    • Adhesion to Grommet of FOUP
  • 3Monitor N2 Gas flow rate by flow meter

  • 4Control N2 Gas flow rate by MFC

  • 5Feild Upgrade from Standard SELOP8 to N2 Purge Load Port is possible

N2 purging on Carrier Base

Superior Stable N2 Purge by Original movable nozzle. Patent pending
  • Control nozzle up/down timingAvoid interference to Kinematic Pin during FOUP placement Interoperatability of non-N2 purge FOUP
  • Adjustment function of nozzle pressure
  • Exchangeable nozzle heads for Suitable attach to ports
  • Nozzle up / down position detect function (Sensor)