Contributing to quality improvement in semiconductor device manufacturing

for Front-End Process

支持进一步微细化的次时代机型 300mm FOUP Load Port SELOP-8
与300㎜ BOLTS-M安装面完美互换 BOLTS-M SMIF Load Port
300㎜/200㎜ Auto Switch Load Port SELOP-8 300mm N2 EFEM
300mm EFEM
支持高效率、稳定的晶元移位 Sorter 面向LED/功率半导体 Automated Wafer Transportation System N2 Purge SELOP-7-N

for Back-End Process

为后段工序的自动化提供支持 Tape Frame FOUP Load Port Tape Frame Wafer EFEM